A California-based laboratory is set to lay the groundwork for the next evolution of extreme ultraviolet (EUV) lithography. Led by Lawrence Livermore National Laboratory (LLNL), the project aims for ...

In a breakthrough set to revolutionize the semiconductor industry, engineers have developed the world's first-of-its-kind deep-ultraviolet (UVC) microLED display array for lithography machines. This ...

Scientists developed a two-photon-enhanced metasurface that cuts photon requirements for nanoscale displacement measurement ...

Integrated optical signal distributing, processing, and sensing networks require the miniaturization of basic optical elements, such as waveguides, splitters, gratings, and optical switches. To ...

To hedge against growing geopolitical and supply chain risks, Washington and Beijing have utilized industrial policies in recent years to bolster domestic semiconductor manufacturing. Although ...