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The cathode holder disk is part of the NEC multi-cathode source of negative ions by cesium sputtering. Cathodes of 60 Fe samples and blank samples were installed on the holder disk. Researchers at the ...
Able to meet the cathode voltage and power requirements for dc magnetron sputtering sources, the 600-W EK Series and 1.2-kW EQ Series with sputtering option provide from 0 to 800 W at 750 mA or 1.5 A, ...
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